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1

Plasma etch characteristics of aluminum nitride mask layers grown by low-temperature plasma enhanced atomic layer deposition in SF6 based plasmas

Perros, Alexander, Bosund, Markus, Sajavaara, Timo, Laitinen, Mikko, Sainiemi, Lauri, Huhtio, Teppo, Lipsanen, Harri

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Year:

2012

Language:

english

File:

PDF, 930 KB

english, 2012

2

Reversible switching between superhydrophobic states on a hierarchically structured surface

Verho, T., Korhonen, J. T., Sainiemi, L., Jokinen, V., Bower, C., Franze, K., Franssila, S., Andrew, P., Ikkala, O., Ras, R. H. A.

Journal:

Proceedings of the National Academy of Sciences

Year:

2012

Language:

english

File:

PDF, 1.37 MB

english, 2012

3

Fabrication of thermal microbridge actuators and characterization of their electrical and mechanical responses

Lauri Sainiemi, Kestas Grigoras, Ivan Kassamakov, Kalle Hanhijärvi, Juha Aaltonen, Ji Fan, Ville Saarela, Edward Hæggström, Sami Franssila

Journal:

Sensors and Actuators A: Physical

Year:

2009

Language:

english

File:

PDF, 1.72 MB

english, 2009

4

Through-Silicon Stroboscopic Characterization of an Oscillating MEMS Thermal Actuator Using Supercontinuum Interferometry

Hanhijarvi, Kalle, Kassamakov, Ivan, Aaltonen, Juha, Heikkinen, Ville, Sainiemi, Lauri, Franssila, Sami, Haeggstrom, Edward

Journal:

IEEE/ASME Transactions on Mechatronics

Year:

2013

Language:

english

File:

PDF, 299 KB

english, 2013

5

Controlled Lateral Spreading and Pinning of Oil Droplets Based on Topography and Chemical Patterning

Jokinen, Ville, Sainiemi, Lauri, Franssila, Sami

Journal:

Year:

2011

Language:

english

File:

PDF, 2.62 MB

english, 2011

6

[IEEE TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference - Denver, CO, USA (2009.06.21-2009.06.25)] TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference - Fabrication of nanoperforated silicon membranes with tunable sized high aspect ratio holes

Sainiemi, L., Viheriala, J., Laukkanen, J., Niemi, T., Franssila, S.

Year:

2009

Language:

english

File:

PDF, 1.01 MB

english, 2009

7

Complex Droplets on Chemically Modified Silicon Nanograss

Ville Jokinen, Lauri Sainiemi, Sami Franssila

Journal:

Advanced Materials

Year:

2008

Language:

english

File:

PDF, 300 KB

english, 2008

8

Non-Reflecting Silicon and Polymer Surfaces by Plasma Etching and Replication

Lauri Sainiemi, Ville Jokinen, Ali Shah, Maksim Shpak, Susanna Aura, Pia Suvanto, Sami Franssila

Journal:

Advanced Materials

Year:

2011

Language:

english

File:

PDF, 425 KB

english, 2011

9

Non-Reflecting Surfaces: Non-Reflecting Silicon and Polymer Surfaces by Plasma Etching and Replication (Adv. Mater. 1/2011)

Lauri Sainiemi, Ville Jokinen, Ali Shah, Maksim Shpak, Susanna Aura, Pia Suvanto, Sami Franssila

Journal:

Advanced Materials

Year:

2011

File:

PDF, 2.30 MB

2011

10

Superhydrophobic Tracks for Low-Friction, Guided Transport of Water Droplets

Henrikki Mertaniemi, Ville Jokinen, Lauri Sainiemi, Sami Franssila, Abraham Marmur, Olli Ikkala, Robin H. A. Ras

Journal:

Advanced Materials

Year:

2011

Language:

english

File:

PDF, 726 KB

english, 2011

11

Selective Surface Patterning with an Electric Discharge in the Fabrication of Microfluidic Structures

Niina M. Suni, Markus Haapala, Ari Mäkinen, Lauri Sainiemi, Sami Franssila, Elina Färm, Esa Puukilainen, Mikko Ritala, Risto Kostiainen

Journal:

Angewandte Chemie

Year:

2008

Language:

english

File:

PDF, 538 KB

english, 2008

12

Selective Surface Patterning with an Electric Discharge in the Fabrication of Microfluidic Structures

Niina M. Suni, Markus Haapala, Ari Mäkinen, Lauri Sainiemi, Sami Franssila, Elina Färm, Esa Puukilainen, Mikko Ritala, Risto Kostiainen

Journal:

Angewandte Chemie International Edition

Year:

2008

Language:

english

File:

PDF, 538 KB

english, 2008

13

Surface Assisted Laser Desorption/Ionization on Two-Layered Amorphous Silicon Coated Hybrid Nanostructures

Ville Jokinen, Susanna Aura, Laura Luosujärvi, Lauri Sainiemi, Tapio Kotiaho, Sami Franssila, Marc Baumann

Journal:

Journal of the American Society for Mass Spectrometry

Year:

2009

Language:

english

File:

PDF, 1.02 MB

english, 2009

14

Fabrication and fluidic characterization of silicon micropillar array electrospray ionization chip

Lauri Sainiemi, Teemu Nissilä, Ville Jokinen, Tiina Sikanen, Tapio Kotiaho, Risto Kostiainen, Raimo A. Ketola, Sami Franssila

Journal:

Sensors and Actuators B: Chemical

Year:

2008

Language:

english

File:

PDF, 1.41 MB

english, 2008

15

Fully polymeric integrated microreactor/electrospray ionization chip for on-chip digestion and mass spectrometric analysis

Teemu Nissilä, Lauri Sainiemi, Sami Franssila, Raimo A. Ketola

Journal:

Sensors and Actuators B: Chemical

Year:

2009

Language:

english

File:

PDF, 839 KB

english, 2009

16

Silicon micropillar array electrospray chip for drug and biomolecule analysis

Teemu Nissilä, Lauri Sainiemi, Tiina Sikanen, Tapio Kotiaho, Sami Franssila, Risto Kostiainen, Raimo A. Ketola

Journal:

Rapid Communications in Mass Spectrometry

Year:

2007

Language:

english

File:

PDF, 211 KB

english, 2007

17

Selective surface patterning with electric discharge

N. Suni, M. Haapala, A. Mäkinen, L. Sainiemi, S. Franssila, E. Färm, E. Puukilainen, M. Ritala, J. Yli-Kauhaluoma, R. Kostiainen

Journal:

European Journal of Pharmaceutical Sciences

Year:

2008

Language:

english

File:

PDF, 53 KB

english, 2008

18

Rotating multitip micropillar array electrospray ionization-mass spectrometry for rapid analysis and high-throughput screening

Teemu Nissilä, Nina Backman, Marjo Kolmonen, Antti Leinonen, Alexandros Kiriazis, Jari Yli-Kauhaluoma, Lauri Sainiemi, Risto Kostiainen, Sami Franssila, Raimo A. Ketola

Journal:

International Journal of Mass Spectrometry

Year:

2012

Language:

english

File:

PDF, 615 KB

english, 2012

19

Optical temperature measurements of silicon microbridge emitters

Shpak, Maksim, Sainiemi, Lauri, Ojanen, Maija, Kärhä, Petri, Heinonen, Martti, Franssila, Sami, Ikonen, Erkki

Journal:

Year:

2010

Language:

english

File:

PDF, 562 KB

english, 2010

20

Fabrication of nanocluster silicon surface with electric discharge and the application in desorption/ionization on silicon-mass spectrometry

Suni, Niina M., Haapala, Markus, Färm, Elina, Härkönen, Emma, Ritala, Mikko, Sainiemi, Lauri, Franssila, Sami, Kotiaho, Tapio, Kostiainen, Risto

Journal:

Year:

2010

Language:

english

File:

PDF, 305 KB

english, 2010

21

Effective Passivation of Black Silicon Surfaces by Atomic Layer Deposition

Repo, Päivikki, Haarahiltunen, Antti, Sainiemi, Lauri, Yli-Koski, Marko, Talvitie, Heli, Schubert, Martin C., Savin, Hele

Journal:

IEEE Journal of Photovoltaics

Year:

2013

Language:

english

File:

PDF, 577 KB

english, 2013

22

Integration of Fully Microfabricated, Three-Dimensionally Sharp Electrospray Ionization Tips with Microfluidic Glass Chips

Sainiemi, Lauri, Sikanen, Tiina, Kostiainen, Risto

Journal:

Analytical Chemistry

Year:

2012

Language:

english

File:

PDF, 982 KB

english, 2012

23

A microfabricated silicon platform with 60 microfluidic chips for rapid mass spectrometric analysis

Sainiemi, Lauri, Nissilä, Teemu, Kostiainen, Risto, Ketola, Raimo A., Franssila, Sami

Journal:

Year:

2011

Language:

english

File:

PDF, 273 KB

english, 2011

24

Integrated photocatalytic micropillar nanoreactor electrospray ionization chip for mimicking phase I metabolic reactions

Nissilä, Teemu, Sainiemi, Lauri, Karikko, Mika-Matti, Kemell, Marianna, Ritala, Mikko, Franssila, Sami, Kostiainen, Risto, Ketola, Raimo A.

Journal:

Year:

2011

Language:

english

File:

PDF, 242 KB

english, 2011

25

Rapid fabrication of high aspect ratio silicon nanopillars for chemical analysis

Sainiemi, Lauri, Keskinen, Helmi, Aromaa, Mikko, Luosujärvi, Laura, Grigoras, Kestas, Kotiaho, Tapio, Mäkelä, Jyrki M, Franssila, Sami

Journal:

Year:

2007

Language:

english

File:

PDF, 1.55 MB

english, 2007

26

[IEEE TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference - Lyon, France (2007.06.10-2007.06.14)] TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference - High Sensitivity Micropillar Electrosprayionization Chip Fabricated of Silicon

Sainiemi, L., Nissila, T., Sikanen, T., Kotiaho, T., Kostiainen, R., Ketola, R. A., Franssila, S.

Year:

2007

Language:

english

File:

PDF, 2.93 MB

english, 2007

27

Electronic cooling of a submicron-sized metallic beam

Muhonen, J. T., Niskanen, A. O., Meschke, M., Pashkin, Yu. A., Tsai, J. S., Sainiemi, L., Franssila, S., Pekola, J. P.

Journal:

Applied Physics Letters

Year:

2009

Language:

english

File:

PDF, 474 KB

english, 2009

28

[IEEE TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference - Lyon, France (2007.06.10-2007.06.14)] TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference - Atomic Layer Deposition of Al2O3, TiO2 and ZnO Films into High Aspect Ratio Pores

Sirvio, S., Sainiemi, L., Franssila, S., Grigoras, K.

Year:

2007

Language:

english

File:

PDF, 2.97 MB

english, 2007

29

[IEEE TRANSDUCERS 2011 - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference - Beijing, China (2011.06.5-2011.06.9)] 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference - Microfabricated electrospray ionization platform with 60 tips for high throughput mass spectrometric analyses

Sainiemi, L., Nissila, T., Kostiainen, R., Ketola, R. A., Franssila, S.

Year:

2011

Language:

english

File:

PDF, 2.40 MB

english, 2011

30

Mask material effects in cryogenic deep reactive ion etching

L. Sainiemi, S. Franssila

Year:

2007

Language:

english

File:

PDF, 642 KB

english, 2007

31

Microfabrication of low thermal mass heated nebulizer chips for mass spectrometry

Wirtssohn, Matti, Sainiemi, Lauri, Haapala, Markus, Franssila, Sami

Journal:

Journal of Micromechanics and Microengineering

Year:

2013

Language:

english

File:

PDF, 198 KB

english, 2013

32

Suspended nanostructured alumina membranes

Sainiemi, Lauri, Grigoras, Kestas, Franssila, Sami

Journal:

Year:

2009

Language:

english

File:

PDF, 1.70 MB

english, 2009

33

Nanoperforated silicon membranes fabricated by UV-nanoimprint lithography, deep reactive ion etching and atomic layer deposition

Sainiemi, Lauri, Viheriälä, Jukka, Sikanen, Tiina, Laukkanen, Janne, Niemi, Tapio

Journal:

Journal of Micromechanics and Microengineering

Year:

2010

Language:

english

File:

PDF, 2.33 MB

english, 2010

34

Dry fabrication of microdevices by the combination of focused ion beam and cryogenic deep reactive ion etching

N. Chekurov, K. Grigoras, L. Sainiemi, A. Peltonen, I. Tittonen, S. Franssila

Year:

2010

Language:

english

File:

PDF, 836 KB

english, 2010

35

Stroboscopic supercontinuum white-light interferometer for MEMS characterization

K. Hanhijärvi, I. Kassamakov, V. Heikkinen, J. Aaltonen, L. Sainiemi, K. Grigoras, S. Franssila, E. Hæggström

Year:

2012

Language:

english

File:

PDF, 302 KB

english, 2012

36

SPIE Proceedings [SPIE SPIE Europe Optical Metrology - Munich, Germany (Monday 15 June 2009)] Optical Measurement Systems for Industrial Inspection VI - Dynamic evaluation of lateral and vertical displacement of thermally actuated MEMS devices

Hanhijärvi, Kalle, Lehmann, Peter H., Aaltonen, Juha, Kassamakov, Ivan, Sainiemi, Lauri, Grigoras, Kestutis, Franssila, Sami, Hæggström, Edward

Year:

2009

Language:

english

File:

PDF, 798 KB

english, 2009

37

UV-Embossed Inorganic–Organic Hybrid Nanopillars for Bioapplications

Aura, S., Jokinen, V., Sainiemi, L., Baumann, M., Franssila, S.

Journal:

Journal of Nanoscience and Nanotechnology

Year:

2009

Language:

english

File:

PDF, 3.07 MB

english, 2009

38

Application of ultra-thin aluminum oxide etch mask made by atomic layer deposition technique

Grigoras, K, Sainiemi, L, Tiilikainen, J, Säynätjoki, A, Airaksinen, V-M, Franssila, S

Journal:

Journal of Physics Conference Series

Year:

2007

Language:

english

File:

PDF, 888 KB

english, 2007

39

SPIE Proceedings [SPIE Photonics Europe - Strasbourg, France (Monday 7 April 2008)] Optical Sensors 2008 - Effect of LED spectral shift on vertical resolution in stroboscopic white light interferometry

Hanhijärvi, Kalle, Berghmans, Francis, Mignani, Anna G., Aaltonen, Juha, Kassamakov, Ivan, Cutolo, Antonello, Meyrueis, Patrick P., Grigoras, Kestutis, Sainiemi, Lauri, Pearsall, Thomas P., Franssila,

Year:

2008

Language:

english

File:

PDF, 384 KB

english, 2008

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